Spacer etch Lining TEOS Lining TEOS Oxide Striping lining oxide 50 SN SP IMP
etch Back , etch back
CLEAN PHOTO DIFF CMP IMP METAL CVD ETCH 304
BHF BOE , BOE Buffered Oxide Etch BOE HF NH F BHF BOE
EPD
EPD , CF4 gt CF4 gt CF3 F EPD Dry etch Wet etch etch layer damage layer open open
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ICP CCP
ICP CCP dry etch Plasma gas dry etch ICP Inductive Coupled Plasma
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ETCH LRM ETCH LRM . Nov 14 2023 nbsp 0183 32 TRN ETCH Triple Patterning Lithography TPL 1 Apr 7 2020 nbsp 0183 32 ETCH PHOTO THIN FILM DIFF C amp C ETCH PHOTO
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