Etch Overview

Spacer etch Lining TEOS Lining TEOS Oxide Striping lining oxide 50 SN SP IMP

etch Back , etch back

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CLEAN PHOTO DIFF CMP IMP METAL CVD ETCH 304

BHF BOE , BOE Buffered Oxide Etch BOE HF NH F BHF BOE

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EPD

EPD , CF4 gt CF4 gt CF3 F EPD Dry etch Wet etch etch layer damage layer open open

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ICP CCP

ICP CCP dry etch Plasma gas dry etch ICP Inductive Coupled Plasma

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ETCH LRM ETCH LRM . Nov 14 2023 nbsp 0183 32 TRN ETCH Triple Patterning Lithography TPL 1 Apr 7 2020 nbsp 0183 32 ETCH PHOTO THIN FILM DIFF C amp C ETCH PHOTO

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